真(zhen)空(kong)(kong)(kong)熱處(chu)理即(ji)真(zhen)空(kong)(kong)(kong)技(ji)術(shu)與熱處(chu)理兩(liang)個專業相結合的(de)綜合技(ji)術(shu),是指熱處(chu)理工藝的(de)全部(bu)和(he)部(bu)分(fen)在(zai)真(zhen)空(kong)(kong)(kong)狀態(tai)下進(jin)行(xing)的(de)。我國(guo)將真(zhen)空(kong)(kong)(kong)劃分(fen)為低(di)、中、高(gao)(gao)和(he)超高(gao)(gao)真(zhen)空(kong)(kong)(kong)。目前大多數真(zhen)空(kong)(kong)(kong)熱處(chu)理爐的(de)工作真(zhen)空(kong)(kong)(kong)度在(zai)1.33~1.33×10ˉ3Pa。
真(zhen)(zhen)空(kong)熱(re)(re)處(chu)理(li)(li)幾乎(hu)可(ke)實(shi)現(xian)全(quan)部熱(re)(re)處(chu)理(li)(li)工(gong)(gong)(gong)藝,如(ru)淬(cui)(cui)火(huo)、退火(huo)、回火(huo)、滲碳(tan)、氮化,在淬(cui)(cui)火(huo)工(gong)(gong)(gong)藝中(zhong)可(ke)實(shi)現(xian)氣淬(cui)(cui)、油淬(cui)(cui)、硝鹽淬(cui)(cui)火(huo)、水淬(cui)(cui)等(deng),還(huan)可(ke)以(yi)進行真(zhen)(zhen)空(kong)釬(han)焊(han)、燒結、表(biao)面(mian)處(chu)理(li)(li)等(deng)。真(zhen)(zhen)空(kong)熱(re)(re)處(chu)理(li)(li)爐(lu)熱(re)(re)效(xiao)率高(gao)(gao),可(ke)實(shi)現(xian)快(kuai)速(su)升溫和(he)(he)(he)降溫,可(ke)實(shi)現(xian)無氧化、無脫(tuo)碳(tan)、無滲碳(tan),可(ke)去掉(diao)工(gong)(gong)(gong)件表(biao)面(mian)的鱗屑,并有(you)脫(tuo)脂除氣等(deng)作用(yong)(yong),從而(er)達到表(biao)面(mian)光亮凈(jing)化的效(xiao)果。一般來說,被(bei)(bei)處(chu)理(li)(li)的工(gong)(gong)(gong)件在爐(lu)內加熱(re)(re)緩慢,內熱(re)(re)溫差較(jiao)小(xiao),熱(re)(re)應力小(xiao),因而(er)變形小(xiao)。產品(pin)合格率高(gao)(gao)。可(ke)降低成(cheng)本,有(you)除氣作用(yong)(yong),從而(er)提(ti)高(gao)(gao)了(le)工(gong)(gong)(gong)作的機(ji)械性能和(he)(he)(he)使用(yong)(yong)壽命。工(gong)(gong)(gong)作環境好,操作安全(quan),沒有(you)污(wu)染和(he)(he)(he)公害。被(bei)(bei)處(chu)理(li)(li)的工(gong)(gong)(gong)件沒有(you)氫(qing)脆危險,對鈦材(cai)和(he)(he)(he)難(nan)熔金(jin)屬殼防止表(biao)面(mian)氫(qing)脆,真(zhen)(zhen)空(kong)熱(re)(re)處(chu)理(li)(li)工(gong)(gong)(gong)藝的穩定性和(he)(he)(he)重復性好。這一系列的優點,開發(fa)真(zhen)(zhen)空(kong)熱(re)(re)處(chu)理(li)(li)設備(bei)和(he)(he)(he)工(gong)(gong)(gong)藝被(bei)(bei)越(yue)來越(yue)重視(shi)和(he)(he)(he)應用(yong)(yong)越(yue)來越(yue)廣。
中科同志(zhi)科技專門(men)針對(dui)可靠(kao)性焊接行業,專門(men)開發了真空熱處(chu)理爐。在晶圓生(sheng)產(chan)、激(ji)光(guang)器燒結(jie)(jie)、激(ji)光(guang)雷達燒結(jie)(jie)等領(ling)域積累的豐富(fu)的真空燒結(jie)(jie)工藝。